Ultra-precision finishing of micro aspherical surface by ultrasonic vibration assisted polishing

Key Engineering Materials

Volumn 291-292, Issue , 2005, Pages 349-354

  Suzuki, H ^a   Kawamori, R ^a   Miyabara, M ^b   Okino, T ^a   Hijikata, Y ^a   Yamamoto, Y ^a   Nakamoto, K ^a   Moriwaki, T ^a   Shibutani, H ^c  

^a KOBE UNIVERSITY   (Japan)

^b TOYOHASHI UNIVERSITY OF TECHNOLOGY   (Japan)

^c SAITAMA UNIVERSITY   (Japan)

Author keywords

Finishing of ground molding dies; Improvement of surface roughness and form accuracy; Micro aspherical polishing; Ultrasonic vibration assisted polishing

Indexed keywords

CARBIDE DIES; DIGITAL DEVICES; GLASS; LENSES; MOLDING; SURFACE ROUGHNESS; TUNGSTEN CARBIDE; ULTRASONIC EFFECTS; ULTRASONIC WAVES;

ASPHERICAL; ASPHERICAL GLASS LENS; ASPHERICAL SURFACE; DIGITAL IMAGE SENSORS; FORM ACCURACY; MOLDING DIES; ULTRA PRECISION; ULTRASONIC VIBRATION;

POLISHING;

EID: 34249298652     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/KEM.291-292.349     Document Type: Conference Paper

References (4)

1. Suzuki, H. et al., (1998) 'Precision Grinding of Aspherical CVD-SiC Molding Die', Int.J.JapanSociety for Precision Engineering, Vol.32, No.1, 25-30.
2. Suzuki, H. et al., (1993) 'Development of Off- Axis Ellipsoidal Mirrors', 7th Int'l Precision Engineering Seminar 801-812.
3. Suzuki, H.etal, (2004)' Ultraprecision Finishing of Micro Aspherical Surface by Ultrasonic Assisted Polishing'euspen 4th international conference 213-214.
4. Suzuki, H. et al., (1998) 'Precision Grinding of Micro Aspheical Surface - Feasibility Study of 250 μm Aspherical Grinding -', Proceedings of Annual Meeting of the ASPE (St.Louis), Vol.16, 149-152.