Improvement of soft magnetic properties of Si/NiFe/FeCoB thin films at Gigahertz band frequency range by multilayer configuration

IEEE Transactions on Magnetics

Volumn 43, Issue 6, 2007, Pages 2627-2629

  Hashimoto, A ^a   Nakagawa, S ^a   Yamaguchi, M ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

High frequency; Permeability; Resonance frequency; Soft magnetic material; Thin film

Indexed keywords

FILM THICKNESS; MAGNETIC PERMEABILITY; MULTILAYER FILMS; NATURAL FREQUENCIES; SOFT MAGNETIC MATERIALS;

FREQUENCY DEPENDENCE; GIGAHERTZ BAND FREQUENCY; SOFT MAGNETIC PROPERTIES;

MAGNETIC THIN FILMS;

EID: 34249109706     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2007.893797     Document Type: Article

References (4)

1. S. Ito, T. Okamoto, S. H. Kong, and S. Nakagawa, "Fe-Co-B/[Ni-Fe/Si] soft magnetic underlayer with high anisotropy field along cross-track direction on disk substrate," J. Magn. Magn. Mater., vol. 287, pp. 281-286, 2005.
2. M. Munakata, S. Aoqui, and M. Yagi, "B-concentration dependence on anisotropy field of CoFeB thin film for gigaherts frequency use," IEEE Trans. Magn., vol. 41, no. 10, pp. 3262-3264, Oct. 2005.
3. A. Hashimoto, S. Ito, and S. Nakagawa, "Improvement of in-plane anisotropy field in FeCoB/NiFe/Si thin films by Kr sputtering," J. Magn. Magn. Mater., vol. 310, pp. 2636-2637, 2007.
4. M. Yamaguchi, Y. Miyazawa, K. Kaminishi, and K. I. Arai, "A new 1 MHz-9 Ghz thin-film permeameter using side-open TEM cell and planar shielded-loop coil," Trans. Magn. Soc. Jpn., vol. 3, pp. 137-140, 2003.