Catalyst-referred etching of silicon

Science and Technology of Advanced Materials

Volumn 8, Issue 3, 2007, Pages 162-165

  Hara, Hideyuki ^a   Sano, Yasuhisa ^a   Arima, Kenta ^a   Yagi, Keita ^a   Murata, Junji ^a   Kubota, Akihisa ^b   Mimura, Hidekazu ^a   Yamauchi, Kazuto ^a  

^a OSAKA UNIVERSITY   (Japan)

^b KUMAMOTO UNIVERSITY   (Japan)

Author keywords

Atomic force microscopy; Catalyst; Etching; Hydrofluoric acid; Platinum; Polishing; Polysilicon; Scanning electron microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; CATALYSTS; ETCHING; HYDROFLUORIC ACID; PLATINUM; POLISHING; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS;

CATALYST REFERRED ETCHING (CARE); LOCAL ETCHING; PLANARIZE POLYSILICON;

POLYSILICON;

EID: 34249074048     PISSN: 14686996     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.stam.2006.12.004     Document Type: Article

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