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Volumn 62, Issue 4, 2007, Pages 357-369

Effect of mass spectrometric sampling interface on the fundamental parameters of an inductively coupled plasma as a function of its operating conditions. Part I. Applied r.f. power and vacuum

Author keywords

Effect of sampling interface; Fundamental parameters; Inductively coupled plasma mass spectrometry; Rayleigh scattering; Thomson scattering

Indexed keywords

CARRIER CONCENTRATION; ELECTRON TEMPERATURE; INTERFACES (MATERIALS); RAYLEIGH SCATTERING;

EID: 34249047066     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2007.03.015     Document Type: Article
Times cited : (20)

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