A linear microactuator with enhanced design

Microsystem Technologies

Volumn 7, Issue 5-6, 2002, Pages 261-264

  Edler, J ^a   Stolting H D ^a   Fohse M ^a   Gatzen, H H ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MOTORS; STATORS; STRUCTURAL DESIGN; THIN FILMS;

DYNAMIC MOTOR; LINEAR MICROACTUATOR DESIGN; PHASE DESIGN; VARIABLE RELUCTANCE (VR);

MICROACTUATORS;

EID: 0005621618     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420100112     Document Type: Conference Paper

References (8)

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