Deposition of poly[2-(perfluorooctyl)ethyl acrylate] from liquid CO2 high-pressure free meniscus coating-Uniformity and morphology

Journal of Supercritical Fluids

Volumn 42, Issue 1, 2007, Pages 129-141

  Kim, Jaehoon ^a   Carbonell, Ruben G ^a  

^a North Carolina State University   (United States)

Author keywords

Free meniscus coating; Liquid carbon dioxide; Poly 2 (perfluorooctyl)ethyl acrylate ; Thin fluorinated film

Indexed keywords

ACRYLICS; CARBON DIOXIDE; DEPOSITION; ELLIPSOMETRY; EVAPORATION; OPTICAL MICROSCOPY; POLYMER FILMS; SILICON WAFERS; SOLVENTS;

FILM MORPHOLOGY; FLUOROPOLYMER FILMS; FREE MENISCUS COATING; LIQUID CARBON DIOXIDE;

FLUORINE CONTAINING POLYMERS;

EID: 34248679876     PISSN: 08968446     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.supflu.2007.01.012     Document Type: Article

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