Optical waveguide biosensor based on two-dimensional diffractive elements obtained by nano-imprint lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6475, Issue , 2007, Pages

  Grego, Sonia ^a   Yang, Cao ^b   Bower, Christopher A ^a   Stoner, Brian R ^a   Suleski, Thomas J ^b  

^a RTI INTERNATIONAL   (United States)

^b UNIVERSITY OF NORTH CAROLINA AT CHARLOTTE   (United States)

Author keywords

Grating; NIL; Silicon oxynitride; Waveguide

Indexed keywords

DIFFRACTIVE STRUCTURES; GRATING STRUCTURES; SENSITIVITY ENHANCEMENT; SILICON OXYNITRIDE;

DIFFRACTION GRATINGS; DIFFRACTIVE OPTICAL ELEMENTS; NANOIMPRINT LITHOGRAPHY; OPTICAL WAVEGUIDES; WAVEGUIDE COUPLERS;

BIOSENSORS;

LITHOGRAPHY; OPTICS; SENSORS;

EID: 34248646780     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.700616     Document Type: Conference Paper

References (7)

1. Vörös, J., et al., "Optical Grating Coupler Biosensors", Biomaterials, 23, 3699-3710, 2002.
2. Piehler, J., et al., "Characterization of Grating Coupler for Affinity-Based Pesticide Sensing", Applied Optics, 36, 6554-6562, 1997.
3. www.microvacuum.com.
4. Grego, S. et al "Novel grating-based optical waveguide device for sensor applications" in SPIE Defense and Security 6218-33, 2006
5. Tiefenthaler, K., "Integrated Optical Couplers as Chemical Waveguide Sensors", Advances in Biosensors, 2, 261-289, 1992.
6. Grego, S., et al. "Novel Optical-Waveguide Sensing Platform Based on Input Grating Coupler", in SPIE Photonics West, 6213-14 2006
7. Grego, S. et al. "Angular and wavelength interrogation of optical waveguide biosensor based on imprinted gratings" to be submitted to Sens. Act. A