Epitaxial growth of lead zirconium titanate thin films on Ag buffered Si substrates using rf sputtering

Applied Physics Letters

Volumn 90, Issue 17, 2007, Pages

  Wang, Chun ^a   Laughlin, David E ^a   Kryder, Mark H ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; LEAD COMPOUNDS; MAGNETRON SPUTTERING; MICROSTRUCTURE; PEROVSKITE; POLARIZATION; SILICON ON INSULATOR TECHNOLOGY; SILVER DEPOSITS;

BOTTOM ELECTRODE; ELECTRON DIFFRACTION PATTERN; LEAD ZIRCONIUM TITANATE (PZT);

THIN FILMS;

EID: 34248594203     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2731515     Document Type: Article

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