SiC materials and technologies for sensors development

Materials Science Forum

Volumn 483-485, Issue , 2005, Pages 1009-1014

  Godignon, P ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

Biomedical sensors; Hall sensors; SiC micromachining; SiC sensors

Indexed keywords

ETCHING; HIGH TEMPERATURE APPLICATIONS; INDUCTIVELY COUPLED PLASMA; MEMS; SENSORS;

BIOMEDICAL SENSORS; HALL SENSORS; HIGH TEMPERATURE CONTACT; SIC MICROMACHINING; SIC SENSORS;

SILICON CARBIDE;

EID: 34248505736     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-963-6.1009     Document Type: Conference Paper

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