Preparation and electrical properties of Zn3ln2O 6 thin films

Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy

Volumn 54, Issue 2, 2007, Pages 121-125

  Orikasa, Yuki ^a   Hayashi, Naoaki ^a   Muranaka, Shigetoshi ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Sputtering; Thermoelectric material; Thin film; Zinc indium oxide

Indexed keywords

ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SEEBECK COEFFICIENT; THERMAL EFFECTS; ZINC COMPOUNDS;

POWER FACTOR; SUBSTRATE TEMPERATURE; THERMOELECTRIC MATERIAL; ZINC INDIUM OXIDE;

THIN FILMS;

EID: 34248377420     PISSN: 05328799     EISSN: None     Source Type: Journal    
DOI: 10.2497/jjspm.54.121     Document Type: Article

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