Design issues involved in the development of a membrane-based high-temperature nanocalorimeter

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1288-1291

  Lopeandia A F ^a   Leon Gutierrez E ^a   Rodriguez Viejo J ^a   Munoz F J ^b  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Ge thin film; High temperature stability; Membrane based microsystems; Nanocalorimetry

Indexed keywords

CALORIMETERS; MICROFABRICATION; PHASE TRANSITIONS; ULTRATHIN FILMS;

HIGH-TEMPERATURE ELECTRICAL STABILITY; NANOCALORIMETER; SCANNING NANOCALORIMETER;

NANOTECHNOLOGY;

EID: 34247605981     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.054     Document Type: Article

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