Effect of roughness on adhesion of polymeric coatings used for microgrippers

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1227-1230

  Balabanava, N ^a   Wierzbicki, R ^b   Zielecka, M ^c   Rymuza, Z ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b Nascatec GmbH   (Germany)

^c INDUSTRIAL CHEMISTRY RESEARCH INSTITUTE   (Poland)

Author keywords

Adhesion; Microgripper; Polymer coatings; Roughness

Indexed keywords

ADHESION; INTERFACIAL ENERGY; MICROFABRICATION; NANOPARTICLES; SURFACE ROUGHNESS;

MICROGRIPPERS; NANOBALL STRUCTURES; POLYMERIC COATINGS; POLYMERIC FILMS;

COATINGS;

EID: 34247603073     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.183     Document Type: Article

References (5)

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2. Balabanava N., Chygurinau V., Zielecka M., and Rymuza Z. Journal Czasopismo Techniczne 6-M (2006) 11
3. S. Bou, A. Almansa, N. Balabanava, Z. Rymuza, in: Proceedings of 2005IEEE/ASME International Conference on Advanced Intelligent Mechatronics, pp. 384-389.
4. Sviridenok A.I., Chizhik A.S., and Petrokovets M.I. Mechanics of Discontinuous Friction Iinteraction (1990), Tekhnika, Minsk (in Russian).
5. Volland B.E., Heerlein H., and Rangelow I.W. Microelectronic Engineering (2002) 1015-1023