Fabrication of conductometric chemical sensors by photolithography of conductive polymer composites

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1211-1214

  Andreadis, N ^a,b   Chatzandroulis, S ^a   Goustouridis, D ^a   Kosma, Vasiliki ^b   Beltsios, K ^b   Raptis, I ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b UNIVERSITY OF IOANNINA   (Greece)

Author keywords

Chemical sensors; Conductive polymer composites; Lithography; Polymer deposition

Indexed keywords

ABSORPTION; CARBON BLACK; COMPOSITE MATERIALS; CONDUCTING POLYMERS; ELECTRODES; FABRICATION; PARAMAGNETIC RESONANCE; PHOTOLITHOGRAPHY;

CARBON BLACK SYSTEM; COMPOSITE POLYMERS; CONDUCTIVE POLYMER COMPOSITES; POLYMER DEPOSITION;

CHEMICAL SENSORS;

EID: 34247581794     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.050     Document Type: Article

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