A lithographic polymer process sequence for chemical sensing arrays

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1192-1196

  Kitsara, Maria ^a,b   Goustouridis, Dimitrios ^a   Chatzandroulis, Stavros ^a   Beltsios, Konstantinos ^c   Raptis, Ioannis ^a  

^a INSTITUTE OF MICROELECTRONICS   (Greece)

^b UNIVERSITY OF ATHENS   (Greece)

^c UNIVERSITY OF IOANNINA   (Greece)

Author keywords

Chemical sensors; Lithography; Polymer deposition; Polymer engineering; Polymer swelling

Indexed keywords

CHEMICAL SENSORS; IRRADIATION; LITHOGRAPHY; ORGANIC COMPOUNDS; SENSITIVITY ANALYSIS; THICKNESS MEASUREMENT; THIN FILMS;

POLYMER DEPOSITION; POLYMER ENGINEERING; POLYMER SWELLING; SENSING LAYERS;

INORGANIC POLYMERS;

EID: 33748252332     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.214     Document Type: Article

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