3D nanohelix fabrication and 3D nanometer assembly by focused ion beam stress-introducing technique

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 118-121

  Xia, Ling ^a   Wu, Wengang ^a   Xu, Jun ^a   Hao, Yilong ^a   Wang, Yangyuan ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROLLABILITY; ION BEAMS; PARAMETER ESTIMATION; STRESS ANALYSIS; THREE DIMENSIONAL;

FOCUSED ION BEAMS; NANOHELIXES; NANOMETER ASSEMBLIES; STRUCTURE PARAMETERS;

NANOSTRUCTURED MATERIALS;

EID: 33750107479     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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