Uniformity analysis of wafer scale sub-25 nm wide nanowire array nanoimprint mold fabricated by PEDAL process

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1523-1527

  Sonkusale, Sachin R ^a   Di Spigna, Neil H ^a   Franzon, Paul D ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

Mold; Nanoimprint; Nanowires; PEDAL

Indexed keywords

CRYSTAL STRUCTURE; NANOIMPRINT LITHOGRAPHY; SILICON WAFERS; STATISTICAL METHODS;

PLANAR EDGE DEFINED ALTERNATE LAYER (PEDAL); SIXTEEN LINE-WIDTH STRUCTURES; STANDARD DEVIATION;

NANOWIRES;

CRYSTAL STRUCTURE; LITHOGRAPHY;

EID: 34247553769     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.210     Document Type: Article

References (5)

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