Flexible fabrication of large pixel count piston-tip-tilt mirror arrays for fast spatial light modulators

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1157-1161

  Pardo, Flavio ^a   Cirelli, R A ^a   Ferry, E J ^a   Lai, W Y C ^a   Klemens, F P ^a   Miner, J F ^a   Pai, C S ^a   Bower, J E ^a   Mansfield, W M ^a   Kornblit, A ^a   Sorsch, T W ^a   Taylor, J A ^a   Baker, M R ^a   Fullowan, R ^a   Simon, M E ^a   Aksyuk, V A ^a   Ryf, R ^a   Dyson, H ^a   Arney, S ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

Adaptive optics; Comb drives; DUV; MEMS; Modular fabrication; Phase mirrors; Piston tip tilt mirrors; Scanning mirrors; Spatial light modulators; Wavefront control

Indexed keywords

ASPECT RATIO; ELECTROSTATICS; LIGHT MODULATORS; LITHOGRAPHY; MICROMACHINING; MIRRORS; POLYSILICON;

COMB-DRIVES; MODULAR FABRICATION; PHASE MIRRORS; PISTON-TIP-TILT MIRRORS; SCANNING MIRRORS; WAVEFRONT CONTROL;

OPTICAL FIBER FABRICATION;

EID: 34247552285     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.099     Document Type: Article

References (6)

1. "High Resolution Wavefront Control Using Micromirror Arrays", Technical Digest of the 2004 Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, SC, June 6-10, 2004.
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3. Stewart J.B., Bifano T.G., Bierden P., Corneliss S., Cook T., and Levine B.M. Design and development of a 329-segment tip-tilt piston mirror array for space-based adaptive optics, presented at Photonics West (2006), San Jose, CA January
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