Use of fibre interferometer for AFM cantilever probe displacement control

Key Engineering Materials

Volumn 295-296, Issue , 2005, Pages 77-82

  Shie, N C ^a   Chen, T L ^a   Cheng, K Y ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Atomic force microscope; Cantilever probe; Fibre interferometer

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONTROL SYSTEMS; ELECTROMAGNETIC WAVE PROPAGATION; FABRY-PEROT INTERFEROMETERS; OPTICAL SENSORS; PROBES;

AFM CANTILEVER; FIBRE INTERFEROMETER; FRINGES; LIGHT INTENSITY;

CANTILEVER BEAMS;

EID: 34247524269     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-977-6.77     Document Type: Article

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