Oxidation of vanadium with reactive oxygen plasma: A photoelectron spectroscopy study of the initial stages of the oxide growth process

Thin Solid Films

Volumn 515, Issue 16 SPEC. ISS., 2007, Pages 6544-6547

  Romanyuk, Andriy ^a   Oelhafen, Peter ^a  

^a UNIVERSITY OF BASEL   (Switzerland)

Author keywords

Oxidation; Plasma processing and deposition; Vanadium oxide; XPS

Indexed keywords

FILM GROWTH; INTERFACES (MATERIALS); OXIDATION; PLASMA DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

OXIDATION STATES; OXYGEN PLASMA; REACTIVE OXYGEN; VANADIUM FOILS;

VANADIUM COMPOUNDS;

EID: 34247478480     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.055     Document Type: Article

References (19)

1. Jorgenson G.V. Electrochromic and Thermochromic Materials for Solar Energy Applications with Emphasis on Niobium and Vanadium Oxides. Lawrence Berkeley Laboratory Report, LBL 18299 (1984) Berkeley, USA
2. Granqvist C.G. Handbook on Inorganic Electrochromic Materials (1995), Elsevier Science B.V., Amsterdam
3. Haber J., Witko M., and Tokarz R. Appl. Catal., A 157 (1997) 3
4. Sawatzky G.A., and Post D. Phys. Rev., B 20 (1979) 1546
5. Mendialdue J., Casanova R., and Barbaux Y. J. Electron Spectrosc. Relat. Phenom. 71 (1995) 249
6. Demeter M., Neumann M., and Reichelt W. Surf. Sci. 454-456 (2000) 41
7. Freund H.-J., Kuhlenbeck H., and Staemmler V. Rep. Prog. Phys. 59 (1996) 283
8. Chambers S.A. Surf. Sci. Rep. 39 (2000) 105
9. Raspopov S.A., Gusakov A.G., Voropayev A.G., and Vecher A.A. J. Alloys Compd. 205 (1994) 59
10. Case F.C. Appl. Opt. 28 (1989) 2731
11. Lopez-Carreno L.D., Benitez G., Viscido L., Heras J.M., Yubero F., Espinos J.P., and Gonzalez-Elipe A.R. Surf. Interface Anal. 26 (1998) 235
12. Kottler V., Gillies M.F., and Kuiper A.E.T. J. Appl. Phys. 89 (2001) 3301
13. Mozetic M., Zalar A., Cvelbar U., and Babic D. Surf. Interface Anal. 36 (2004) 986
14. Steigerwald J.M., Murarka S.P., and Gutmann R.J. Chemical Mechanical Planarization of Microelectronic Materials (1997), Wiley, New York
15. Shin S., Suga S., Taaniguchi M., Fujisawa M., Kanzaki H., Fujimori A., Daimon H., Ueda Y., Kosuge K., and Kachi S. Phys. Rev., B 41 (1990) 4993
16. Gupta M., and Ellis D.E. Phys. Rev., B 13 (1976) 3405
17. Doniach S., and Sunjic M. J. Phys. C. Solid State Phys. 3 (1970) 285
18. Shirley D.A. Phys. Rev., B 5 (1972) 4709
19. Fadley C.S. Prog. Surf. Sci. 16 (1984) 275