Effect of residual stress on piezoelectric property of Pb(Zr,Ti)O 3 films fabricated by sol-gel process

Journal of Sol-Gel Science and Technology

Volumn 42, Issue 3, 2007, Pages 305-308

  Lee, Jae Wung ^a   Lee, Sung Mi ^a   Park, Chee Sung ^a   Park, Gun Tae ^a   Kim, Hyoun Ee ^a  

^a Seoul National University   (South Korea)

Author keywords

Piezoelectric; PZT film; Residual stress; Sol gel

Indexed keywords

BENDING (DEFORMATION); ELASTICITY; LEAD COMPOUNDS; PIEZOELECTRICITY; RESIDUAL STRESSES; SOL-GEL PROCESS;

EXTERNAL FORCE; PZT FILMS; SOL-GEL COATINGS;

THIN FILMS;

EID: 34247476727     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10971-007-0761-5     Document Type: Article

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