Preparation of sol-gel-derived Ca1-x Sr x ZrO 3 perovskite dielectric thin films

Journal of Electroceramics

Volumn 18, Issue 1-2, 2007, Pages 149-154

  Yu, T ^a   Chen, C H ^a   Lu, Y K ^a   Chen, X F ^a   Zhu, W ^a   Krishnan, R G ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

Perovskite; Sol gel; Thin films; XRD

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIELECTRIC FILMS; PERMITTIVITY; PEROVSKITE; PHASE TRANSITIONS; SOL-GEL PROCESS; SOLID SOLUTIONS; X RAY DIFFRACTION ANALYSIS;

ANNEALING TEMPERATURE; PEROVSKITE PHASE;

THIN FILMS;

EID: 34247403713     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-007-9017-6     Document Type: Article

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