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Volumn 9, Issue 5, 2007, Pages 879-885
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Conical recessed gold microelectrode arrays produced during photolithographic methods: Characterisation and causes
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Author keywords
Arrays; Conical recessed; Microelectrodes; Scanning electron microscopy; Scanning Kelvin nanoprobe
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Indexed keywords
GOLD COMPOUNDS;
INTERFEROMETERS;
OPTICAL MICROSCOPY;
PHOTOLITHOGRAPHY;
SCANNING ELECTRON MICROSCOPY;
CONICAL RECESSED;
ELECTRODE ARRAYS;
SCANNING KELVIN NANOPROBE (SKN);
MICROELECTRODES;
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EID: 34247224934
PISSN: 13882481
EISSN: None
Source Type: Journal
DOI: 10.1016/j.elecom.2006.11.023 Document Type: Article |
Times cited : (22)
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References (29)
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