The influence of post-deposition annealing on thermoelectric properties of Bi-Sb-Te films prepared by sputtering

Semiconductor Science and Technology

Volumn 22, Issue 2, 2007, Pages 132-136

  Kim, Dong Ho ^a   Lee, Gun Hwan ^a   Kim, Ook Joong ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CRYSTALLIZATION; DEPOSITION; RAPID THERMAL ANNEALING; SEEBECK COEFFICIENT; SPUTTERING; STOICHIOMETRY; TRANSPORT PROPERTIES;

CHARGE CARRIER CONCENTRATION; STOICHIOMETRIC COMPOSITION; THERMOELECTRIC PROPERTIES;

THIN FILMS;

EID: 34247205925     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/22/2/023     Document Type: Article

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