AFM investigation on surface damage caused by mechanical probing with small ruby spheres

Measurement Science and Technology

Volumn 18, Issue 2, 2007, Pages 496-502

  Meli, Felix ^a   Küng, Alain ^a  

^a Swiss Federal Office of Metrology   (Switzerland)

Author keywords

Contact mechanics; Coordinate measuring machine; Mechanical probing; Micro CMM; Plastic surface deformation

Indexed keywords

ATOMIC FORCE MICROSCOPY; MEASUREMENT ERRORS; MEASUREMENT THEORY; PLASTIC DEFORMATION; SURFACE ROUGHNESS;

CONTACT MECHANICS; MECHANICAL PROBING; PLASTIC SURFACE DEFORMATION;

COORDINATE MEASURING MACHINES;

ATOMIC FORCE MICROSCOPY; COORDINATE MEASURING MACHINES; MEASUREMENT ERRORS; MEASUREMENT THEORY; PLASTIC DEFORMATION; SURFACE ROUGHNESS;

EID: 34247201670     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/2/S24     Document Type: Conference Paper

References (12)

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