Theory and design of optical current sensor based on MEMS

Zhongguo Dianji Gongcheng Xuebao/Proceedings of the Chinese Society of Electrical Engineering

Volumn 27, Issue 3, 2007, Pages 89-94

  Zhao, Ben Gang ^a   Xu, Jing ^a   Gao, Xiang ^a   Liu, Yu Fei ^a   Wu, Ya Ming ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Coupling loss; Micro electronic mechanic system; Optical current sensor; Temperature compensation; Torsional micro mirror

Indexed keywords

MATLAB; OPTICAL TRANSITIONS; SENSORS; TEMPERATURE; TRANSDUCERS;

COUPLING LOSS; FIBER COLLIMATOR; OPTICAL CURRENT SENSOR; OPTICAL CURRENT TRANSDUCER; ROGOWSKI COILS; TEMPERATURE COMPENSATION; TORSIONAL MICRO MIRROR;

MEMS;

EID: 34147213575     PISSN: 02588013     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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