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Volumn 263, Issue , 2007, Pages 51-56
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Self-diffusion in covalent amorphous solids - A comparative study using neutron reflectometry and SIMS
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Author keywords
Amorphous silicon nitride; Isotope multilayers; Neutron reflectometry; Secondary ion mass spectrometry; Self diffusion
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Indexed keywords
AMORPHOUS MATERIALS;
CRYSTALLIZATION;
MULTILAYERS;
SECONDARY ION MASS SPECTROMETRY;
SILICON NITRIDE;
AMORPHOUS SILICON NITRIDE;
ISOTOPE MULTILAYERS;
NEUTRON REFLECTOMETRY (NR);
SELF-DIFFUSION;
DIFFUSION;
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EID: 34147189229
PISSN: 10120386
EISSN: 16629507
Source Type: Journal
DOI: 10.4028/3-908451-35-3.51 Document Type: Conference Paper |
Times cited : (4)
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References (15)
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