Precise analysis on shave-off depth profiling

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 258, Issue 1, 2007, Pages 250-252

  Nojima, M ^a,b   Yamamoto, T ^a,b   Ishizaki, Y ^a,b   Owari, M ^b   Nihei, Y ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Charge up; Depth profiling; FIB; Flood gun; Shave off; SIMS

Indexed keywords

DEPTH PROFILING; ELECTRIC POTENTIAL; ION BEAMS; SECONDARY ION MASS SPECTROMETRY; SILICA;

BEAM INTERACTIONS; FLOOD GUN SYSTEMS; ION SIGNALS;

ELECTRON GUNS;

EID: 34147132803     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.12.187     Document Type: Article

References (5)

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3. Toi M., Maekawa A., Yamamoto T., Tomiyasu B., Sakamoto T., Owari M., Nojima M., and Nihei Y. J. Surf. Anal. 12 2 (2005) 170
4. M. Nojima, M. Toi, A. Maekawa, T. Yamamoto, T. Sakamoto, M. Owari, Y. Nihei, Microchim. Acta, 2006, published only online.
5. Utlaut M. Handbook of Charged Particle Optics (1997), CRC Press LLC p. 434