Evaluation of charged environments in environment scanning electron microscope

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

Volumn 27, Issue 1, 2007, Pages 72-75

  Fu, Jingyong ^a   Ji, Yuan ^a   Zhang, Yinqi ^a   Wang, Li ^a   Tian, Yanbao ^a   Xu, Xuedong ^a   Han, Xiaodong ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Charge environment; ESEM; Specimen current

Indexed keywords

ELECTRIC CHARGE; ELECTRIC CURRENT MEASUREMENT; ELECTRON SCATTERING; IONIZATION;

CHARGE ENVIRONMENT; ENVIRONMENT SCANNING ELECTRON MICROSCOPE; SPECIMEN CURRENT;

SCANNING ELECTRON MICROSCOPY;

EID: 34047250661     PISSN: 16727126     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

1. Danilatos G D. Foundation of ESEM. Advances in Electronics and Electron Physics, 1988, 71: 110-248.
2. Toth M, Thiel B L, Donald A M. On the role of electron-ion recombination in Low Vacuum SEM. Journal of Microscopy, 2002, 205: 86-95.
3. Watt G, Brendan, Griffin J. Charge contrast imaging of geological materials in the environmental scanning electron microscope. American Mineralogist, 2000, 85: 1784-1794.