Transparent conductive thin films of Sn doped In2O3 grown by aerosol-assisted CVD using InIII acetylacetonate with 5 mol % SnIV bis-acetylacetonate dibromide dissolved in acetylacetone

Chemical Vapor Deposition

Volumn 12, Issue 10, 2006, Pages 608-613

  Suzuki, Asako ^a   Maki, Kunisuke ^a  

^a YOKOHAMA CITY UNIVERSITY   (Japan)

Author keywords

Aerosol assisted CVD; Electrical properties; Film crystallinity; ITO; Organic solution

Indexed keywords

ACETONE; AEROSOLS; CHEMICAL VAPOR DEPOSITION; CONDUCTIVE FILMS; INDIUM COMPOUNDS; TIN OXIDES;

AEROSOL ASSISTED CVD; FILM CRYSTALLINITY; ORGANIC SOLUTION; ULTRASONIC OSCILLATION;

THIN FILMS;

EID: 34047242652     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.200506379     Document Type: Article

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