The fabrication and application of Zernike electrostatic phase plate

Journal of Electron Microscopy

Volumn 55, Issue 6, 2006, Pages 273-280

  Huang, Sen Hui ^a   Wang, Wan Jhih ^a   Chang, Chia Seng ^b   Hwu, Yeu Kuang ^b   Tseng, Fan Gang ^a   Kai, Ji Jung ^a   Chen, Fu Rong ^a,b,c  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b INSTITUTE OF PHYSICS   (Taiwan)

^c NATIONAL SYNCHROTRON RADIATION RESEARCH CENTER   (Taiwan)

Author keywords

Einzel lens; Electrostatic force microscope; Phase contrast; Phase shifting device; Rose criterion; Zernike electrostatic phase plate

Indexed keywords

ELECTRIC FORCE MICROSCOPY; ELECTROSTATIC DEVICES; ELECTROSTATIC FORCE; MEMS; SEMICONDUCTOR DEVICES;

EINZEL LENS; ELECTROSTATIC FORCE MICROSCOPES; PHASE PLATE; PHASE-CONTRAST; PHASE-SHIFTING; PHASE-SHIFTING DEVICE; RING ELECTRODES; ROSE CRITERIA; ZERNIKE; ZERNIKE ELECTROSTATIC PHASE PLATE;

FABRICATION;

EID: 34047225319     PISSN: 00220744     EISSN: 14779986     Source Type: Journal    
DOI: 10.1093/jmicro/dfl037     Document Type: Article

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