Design method of 3-D active silicon neural microelectrode biosensor based on MEMS technology

Proceedings of the World Congress on Intelligent Control and Automation (WCICA)

Volumn 2, Issue , 2006, Pages 8344-8349

  Wang, Di ^a   Zhang, Guoxiong ^a   Li, Xingfei ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

3 D microelectrode; Active microelectrode array; Biosensor; MEMS (micro electromechanical system); Microstructure

Indexed keywords

INTEGRATED CIRCUIT LAYOUT; MEMS; MICROELECTRODES; MICROSTRUCTURE; NEURAL NETWORKS; SILICON;

3D MICROELECTRODES; ACTIVE MICROELECTRODE ARRAYS; NEURAL RECORDING ARRAYS SYSTEMS; THEORETICAL MEASUREMENT MODELS;

BIOSENSORS;

EID: 34047192427     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WCICA.2006.1713603     Document Type: Conference Paper

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