High fidelity fabrication of microlens arrays by nanoimprint using conformal mold duplication and low-pressure liquid material curing

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 2, 2007, Pages 410-414

  Peng, Can ^a   Liang, Xiaogan ^a   Fu, Zengli ^a   Chou, Stephen Y ^a  

^a PRINCETON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROLENS ARRAYS; SOFT POLYMERS;

CONFORMATIONS; MICROLENSES; NANOIMPRINT LITHOGRAPHY;

OPTICAL FIBER FABRICATION;

ASSEMBLY; LENSES; LITHOGRAPHY; MOLECULAR STRUCTURE;

EID: 34047115370     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2713405     Document Type: Article

References (5)

1. I. Iga et al., Fundamentals of Microoptics (Academic, London, 1984).
2. Z. D. Popovic et al., Appl. Opt. 27, 1281 (1988).
3. Q. Peng et al., Opt. Lett. 27, 1720 (2002).
4. B. P. Keyworth et al., Appl. Opt. 36, 2198 (1997).
5. T. Teshima et al., US Patent 6,835,443 (December 28, 2004).