Silane removal at ambient temperature by using alumina-supported metal oxide adsorbents

Journal of the Air and Waste Management Association

Volumn 57, Issue 2, 2007, Pages 204-210

  Hsu, Jung Nan ^a,b   Tsai, Chuen Jinn ^b   Chiang, Cindy ^b   Li, Shou Nan ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORBENTS; ADSORPTION; ALUMINA; COPRECIPITATION; REMOVAL; THERMAL EFFECTS;

BRUNAUER-EMMETT-TELLER METHOD (BET); METAL OXIDE ADSORBENTS; METAL OXIDES; SILANE REMOVAL;

SILANES;

ADSORBENT; ALUMINUM OXIDE; CERIUM; COPPER; METAL OXIDE; SILANE; ZINC; METAL; OXIDE; SILANE DERIVATIVE;

ADSORPTION; ARTICLE; ENVIRONMENTAL TEMPERATURE; MASS SPECTROMETRY; PRIORITY JOURNAL; X RAY POWDER DIFFRACTION; ABSORPTION; AIR POLLUTANT; AIR POLLUTION; ALGORITHM; CHEMISTRY; POROSITY; TEMPERATURE;

ABSORPTION; AIR POLLUTANTS, OCCUPATIONAL; AIR POLLUTION; ALGORITHMS; ALUMINUM OXIDE; METALS; OXIDES; POROSITY; SILANES; TEMPERATURE;

EID: 33947713462     PISSN: 10962247     EISSN: 21622906     Source Type: Journal    
DOI: 10.1080/10473289.2007.10465309     Document Type: Article

References (14)

1. Li, S.N.; Hsu, J.N.; Shih, H.Y.; Lin, S.J.; Hong, J.L. FTIR spectrometers measure scrubber abatement efficiencies. Solid State Technol. 2002, 45, 157-165.
2. Hayes, M.; Woods, K. Treating Semiconductor Emissions with Point-of-Use Abatement System. Solid State Technol. 1996, 39, 141-146.
3. Haacke, G.; Brinen, J.S.; Burkhard, H. Arsine Adsorption on Activated Carbon; J. Electrochem. Soc. 1988, 3, 715-717.
4. 3 on Activated Carbon; J. Cryst. Growth 1988, 92, 189-195.
5. Hardwick, S.J.; Mailloux, J.C. Waste Minimization in Semiconductor Processing; Mat. Res. Soc. Symp. Proc. 1994, 344, 273-279.
6. Ogle, R.A.; Carpenter, A.R.; Morrison, D.T. Lessons Learned from Fires and Explosions Involving Air Pollution Control Systems; Process Saf. Prog. 2005, 24, 120-125.
7. Deng, S.G.; Lin, Y.S. Synthesis, Stability, and Sulfation Properties of Sol-Gel-Derived Regenerative Sorbents for Flue Gas Desulfurization; Ind. Eng. Chem. Res. 1996, 35, 1429-1437.
8. 3 Sorbent; Ind. Eng. Chem. Res. 1994, 33, 1786-1791.
9. Pinna, F. Supported Metal Catalysts Preparation; Catalysis Today 1998, 41, 129-137.
10. 3 System; Appl. Catal. A:Gen. 1997, 155, 167-178.
11. Akyurtlu, J.F.; Akyurtlu, A. Behavior of Ceria-Copper Oxide Sorbents under Sulfation Conditions; Chem. Eng. Sci. 1999, 54, 2991-2997.
12. Wey, M.Y.; Lu, C.Y.; Tseng, H.H.; Fu, C.H. The Utilization of Catalyst Sorbent in Scrubbing Acid Gases from Incineration Flue Gas; J. Air & Waste Manage. Assoc. 2002, 52, 449-458.
13. Xie, Y.C.; Tang, Y.Q. Spontaneous Monolayer Dispersion of Oxides and Salts onto Surfaces of Supports: Applications to Heterogeneous Catalysis; Adv. Catal. 1990, 37, 1-43.
14. Aarnink, W.A.M.; Weishauot, A.; Silfhout, A.V. Angle-Resolved X-Ray Photoelectron Spectroscopy and a Modified Levenberg-Marquardt Fit Procedure: A New Combination for Modeling Thin Layers; Appl. Surf. Sci. 1990, 45, 37-48.