Reflection properties of hybrid quarter-wavelength silicon microstructures

Applied Physics Letters

Volumn 90, Issue 12, 2007, Pages

  Barillaro, Giuseppe ^a   Annovazzi Lodi, Valerio ^b   Benedetti, Mauro ^b   Merlo, Sabina ^b  

^a UNIVERSITY OF PISA   (Italy)

^b UNIVERSITY OF PAVIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; INFRARED RADIATION; LIGHT REFLECTION; POLARIZATION; SILICON; WAVELENGTH;

ELECTROCHEMICAL DEEP ETCHING; NEAR INFRARED REGION; SILICON MICROSTRUCTURES; STRUCTURE POROSITY;

PERIODIC STRUCTURES;

EID: 33947589227     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2714293     Document Type: Article

References (13)

1. E. Yablonovitch, Phys. Rev. Lett. 58, 2059 (1987).
2. M. M. Hawkeye and M. J. Brett, J. Appl. Phys. 100, 044322 (2006).
3. G. Barillaro, A. Diligenti, M. Benedetti, and S. Merlo, Appl. Phys. Lett. 89, 151110 (2006).
4. G. Barillaro, A. Nannini, and M. Piotto, Sens. Actuators, A 102, 195 (2002).
5. G. Barillaro, A. Diligenti, A. Nannini, and G. Pennelli, Sens. Actuators, A 107, 279 (2003).
6. H. A. Macleod, Thin-Film Optical Filters (Hilger, London, 1969).
7. K. R. Maskaly, G. R. Maskaly, and W. C. Carter, Opt. Lett. 29, 2791 (2004).
8. K. R. Maskaly, V. K. S. Hsiao, A. N. Cartwright, P. N. Prasad, P. F. Lloyd, T. J. Bunning, and W. C. Carter, J. Appl. Phys. 100, 066103 (2006).
9. D. Zhang, Z. Li, W. Hu, and B. Cheng, Appl. Phys. Lett. 67, 2431 (1995).
10. V. A. Tolmachev, T. S. Perova, and K. Berwick, J. Appl. Phys. 99, 033507 (2006).
11. V. A. Tolmachev, T. S. Perova, J. A. Pilyugina, and R. A. Moore, Opt. Commun. 259, 104 (2006).
12. D. N. Chigrin, A. V. Lavrinenko, D. A. Yarotsky, and S. V. Gaponenko, J. Lightwave Technol. 17, 2018 (1999).
13. V. A. Tolmachev, T. S. Perova, and R. A. Moore, Opt. Express 13, 8433 (2005).