Fabrication of functional nano-patterned surfaces by a combination of plasma processes and electron-beam lithography

Nanotechnology

Volumn 18, Issue 13, 2007, Pages

  Brétagnol, Frédéric ^a   Ceriotti, Laura ^a   Valsesia, Andrea ^a   Sasaki, Takao ^a   Ceccone, Giacomo ^a   Gilliland, Douglas ^a   Colpo, Pascal ^a   Rossi, François ^a  

^a JOINT RESEARCH CENTRE   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVES; ELECTRON BEAM LITHOGRAPHY; PLASMA APPLICATIONS; PLASMA POLYMERIZATION; SURFACE ANALYSIS; SURFACE PHENOMENA;

ACTIVE REGION; CARBOXYLIC FUNCTIONAL AREAS; LATERAL SIZE; NANO PATTERNED SURFACES;

NANOSTRUCTURED MATERIALS;

ARTICLE; ELECTRON BEAM; ELECTRONICS; MOLECULAR MODEL; NANOTECHNOLOGY; PLASMA; POLYMERIZATION; PRIORITY JOURNAL; SURFACE PROPERTY;

EID: 33947536403     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/13/135303     Document Type: Article

References (29)

1. Walter G, Bussow K, Lueking A and Gloker J 2002 Trends Mol. Med. 8 250
2. Zhu B, Zhang Q, Lu Q, Xu Y, Yin J, Hu J and Wang Z 2004 Biomaterials 25 4215
3. Curtis A and Riehle M 2001 Phys. Med. Biol. 46 R47
4. Thomas C H, Lhoest J B, Castner D G, McFarland C D and Heal K E 1999 Trans. ASME J. Biomech. Eng. 121 40
5. Kam L, Shain W, Turner J Nv and Bizios R 1999 Biomaterials 20 2343
6. Brétagnol F, Ceriotti L, Lejeune M, Papadopoulou-Bouraoui A, Hasiwa M, Gilliland D, Ceccone G, Colpo P and Rossi F 2006 Plasma Process. Polym. 3 30
7. Falconnet D, Csucs G, Grandin H M and Textor M 2006 Biomaterials 27 3044
8. Arnold M, Ada Cavalcanti-Adam E, Glass R, Blummel J, Eck W, Kantlehner M, Kessler H and Spatz J P 2004 Chem. Phys. Chem. 5 383
9. Renault J P, Bernard A, Bietsch A, Michel B, Bosshard H R, Delamarche E, Kreiter M, Hecht B and Wild U P 2003 J. Phys. Chem. B 107 703
10. Taha H, Marks R S, Gheber L A, Rousso I, Newman J, Sukenik C and Lewis A 2003 Appl. Phys. Lett. 83 1041
11. Voros J, Blatter T and Textor M 2005 Mater. Res. Soc. Bull. 30 202
12. Hulteen C and Duyne R P V 1995 J. Vac. Sci. Technol. A 13 1553
13. Yang S M, Jang S G, Choi D G, Kim S and Yu H K 2006 Small 2 458
14. Valsesia A, Colpo P, Manso S M, Meziani T, Ceccone G and Rossi F 2004 Nano Lett. 4 1047
15. Lussi J W, Tang C, Kuenzi P A, Staufer U, Csucs G, Voros J, Danuser G, Hubbell J A and Textor M 2005 Nanotechnology 16 1781
16. Baralia G G, Pallandre A, Nysten B and Jonas A M 2006 Nanotechnology 17 1160
17. Keselowsky B G, Collard D M and Garcy A J 2003 J. Biomed. Mater. Res. 66A 247
18. Denes F S and Manolache S 2004 Prog. Polym. Sci. 29 815
19. Mar M N, Ratner B D and Yee S S 1999 Sensors Actuators B 54 125
20. Lopez L C, Gristina R, Ceccone G, Rossi F, Favia P and D'Agostino R 2005 Surf. Coat. Technol. 200 1000
21. Lee T G, Shon H K, Kim M S, Lee H B and Moon D W 2006 Appl. Surf. Sci. 252 6754
22. Valsesia A, Colpo P, Meziani T, Lisboa P, Lejeune M and Rossi F 2006 Langmuir 22 1763
23. Lombello C B, Malmonge S M and Wada M L F 2000 J. Mater. Sci. Mater. Med. 11 541
24. McCord M A and Rooks M J 1997 Electron beam lithography Microlithography, Handbook of Microlithography, Micromachining and Microfabrication vol 1 ed P Rai-Choudhury (Bellingham, WA: SPIE Optical Engineering Press) p 204
25. Brétagnol F, Valsesia A, Ceccone G, Colpo P, Gilliland D, Ceriotti L, Hasiwa M and Rossi F 2006 Plasma Process. Polym. 3 443
26. Johnston E E, Bryers J D and Ratner B D 2005 Langmuir 21 870
27. Brétagnol F, Lejeune M, Papadopoulou-Bouraoui A, Hasiwa M, Ceccone G, Colpo P and Rossi F 2006 Acta Biomater. 2 165
28. Brétagnol F, Kylin O, Hasiwa M, Ceriotti L, Rauscher H, Ceccone G, Gilliland D, Colpo P and Rossi F 2006 Sensors Actuators B at press
29. Murata K, Kyser D F and Ting C H 1981 J. Appl. Phys. 52 4396