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Volumn 438, Issue 1-3, 2007, Pages 8-13
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Dissociation dynamics of chloromethyltrimethylsilane at 193 nm
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Author keywords
[No Author keywords available]
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Indexed keywords
DISSOCIATION;
HYDROCARBONS;
METHANE;
SEMICONDUCTING LIQUIDS;
THIN FILMS;
CHLOROMETHYLTRIMETHYLSILANE;
ENERGETICS;
INFRARED EMISSION;
THIN TRANSPARENT FILM;
MOLECULAR DYNAMICS;
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EID: 33947494994
PISSN: 00092614
EISSN: None
Source Type: Journal
DOI: 10.1016/j.cplett.2007.02.052 Document Type: Article |
Times cited : (2)
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References (24)
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