Investigations of helium incorporated into a film deposited by magnetron sputtering

Journal of Physics D: Applied Physics

Volumn 40, Issue 7, 2007, Pages 2150-2156

  Liu, Chao Zhuo ^a   Shi, L Q ^a   Zhou, Z Y ^a   Hao, X P ^b   Wang, B Y ^b   Liu, S ^c   Wang, L B ^c  

^a FUDAN UNIVERSITY   (China)

^b INSTITUTE OF HIGH ENERGY PHYSICS   (China)

^c INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; GLOW DISCHARGES; HELIUM; MAGNETRON SPUTTERING; TITANIUM; X RAY DIFFRACTION;

FILM DEPOSITION; GLOW DISCHARGE ZONES; HELIUM PARTICLES; TITANIUM FILMS;

FILM GROWTH;

EID: 33947414952     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/7/044     Document Type: Article

References (27)

1. Ullmaier H 1983 Proc. Int. Symp. on Fundamental Aspects of Helium in Metals (New York: Gordon and Breach)
2. Ullmaier H 1983 Radiat. Eff. 78 1
3. Lucas A A 1984 Physica B+C 127 225
4. Donnelly S E and Evans J H 1991 Fundamental Aspects of Inert Gases in Solids (New York: Plenum)
5. Cowgill D F 2005 Fusion Sci. Technol. 48 539
6. Jung P, Liu C and Chen J 2001 J. Nucl. Mater. 296 165
7. Prem M, Krexner G and Pleschiusching J 2003 J. Alloys Compounds 356-357 683
8. Trinkaus H and Singh B N 2003 J. Nucl. Mater. 323 229
9. Rajainmäki H, Linderoth S, Hansen H E, Nieminen R M and Bentzon M D 1988 Phys. Rev. B 38 1087
10. Weave H T and Camp W J 1975 Phys. Rev. B 12 3054
11. Rau R C and Ladd R L 1969 J. Appl. Phys. 40 2899
12. Thomas G J 1983 Radiat. Eff. 78 37
13. Krauss A R and Gruen D M 1976 J. Nucl. Mater. 63 380
14. Schiettekatte F, Chicoine M, Gujrathi S, Wei P and Oxorn K 2004 Nucl. Instrum. Methods Phys. Res. B 219-220 125
15. Sen P 1991 Nucl. Instrum. Methods Phys. Res. A 314 366
16. Van Gorkum A A and Kornelsen E V 1981 Vacuum 31 89
17. Oliviero E, Beaufort M F, Barbot J F, Veen A V and Fedorov A V 2003 J. Appl. Phys. 93 231
18. Liu C Z and Shi L 2004 Chin. Phys. Lett. 21 1035
19. Van Siclen C D, Wright R N and Usmar S G 1992 Phys. Rev. Lett. 68 3892
20. Liu C Z et al 2004 Vacuum 75 71
21. Lässer R, Bickmann K and Trinkaus H 1989 Phys. Rev. B 40 3306
22. Vassen R, Trinkaus H and Jung P 1991 J. Nucl. Mater. 183 1
23. Lewis M B 1987 Nucl. Instrum. Methods Phys. Res. B: Beam Interact. Mater. Atoms 22 499
24. Mattox D M and Kominiak G J 1971 J. Vac. Sci. Technol. 8 194
25. Chu W K, Mayer J W and Nicolet M A 1978 Backscattering Spectroscopy (New York: Academic)
26. Wilson W D, Bisson C L and Baskes M I 1981 Phys. Rev. B 24 5616
27. Jensen K O, Eldrup M, Singh B N and Victoria M 1988 J. Phys. F: Met. Phys. 18 1069