An orthogonal fluxgate-type magnetic microsensor with electroplated Permalloy core

Sensors and Actuators, A: Physical

Volumn 135, Issue 1, 2007, Pages 43-49

  Zorlu, O ^a   Kejik, P ^a   Popovic, R S ^a  

^a EPFL   (Switzerland)

Author keywords

CMOS Compatible; Electroplated Permalloy; Fluxgate Sensors; Magnetic Sensors; Orthogonal Fluxgate

Indexed keywords

BANDWIDTH; CMOS INTEGRATED CIRCUITS; ELECTROPLATED PRODUCTS; ENERGY DISSIPATION; MAGNETIC SENSORS; SIGNAL DETECTION;

CMOS COMPATIBLE; ELECTROPLATED PERMALLOY; FLUXGATE SENSORS; MAGNETIC NOISE; ORTHOGONAL FLUXGATE;

MICROSENSORS;

EID: 33947285016     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.10.005     Document Type: Article

References (11)

1. Kaluza F., et al. New and future applications of fluxgate sensors. Sens. Actuators A 106 (2003) 48-51
2. Ripka P. Advances in fluxgate sensors. Sens. Actuators A 106 (2003) 8-14
3. Ripka P. Magnetic Sensors and Magnetometers (January 2001), Artech House Publishers
4. Drljaca P.M., et al. Single core fully integrated CMOS micro-fluxgate magnetometer. Sens. Actuators A 110 (2004) 236-241
5. Park H.S., et al. Development of micro-fluxgate sensors with electroplated magnetic cores for electronic compass. Sens. Actuators A 114 (2004) 224-229
6. Zorlu O., et al. A novel planar magnetic sensor based on orthogonal fluxgate principle. IEEE PRIME'05 Conference. Lausanne, Switzerland, July (2005)
7. O. Zorlu, et al., An orthogonal fluxgate-type magnetic microsensor, MEMS'06, Istanbul, Turkey, 22-26 January 2006, pp. 646-649.
8. Osborn J.A. Demagnetizing factors for the general ellipsoid. Phys. Rev. 67 June (11-12) (1945) 351-357
9. Quemper J.M., et al. Permalloy electroplating through photoresist molds. Sens. Actuators A 74 (1999) 1-4
10. Chikazumi S. Physics of Ferromagnetism (1997), Oxford University Press
11. Vincueria I., et al. Flux-gate sensor based on planar technology. IEEE Trans. Magn. 30 November (6) (1994) 5042-5045