An orthogonal fluxgate-type magnetic microsensor

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 646-649

  Zorlu, O ^a   Kejik, P ^a   Vincent, F ^a   Popovic, R S ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; COSTS; ELECTROPLATING; MAGNETIC DEVICES; SENSITIVITY ANALYSIS; SIGNAL DETECTION;

MAGNETIC MICROSENSORS; PERMALLOY LAYERS; SINUSOIDAL EXCITATION;

MICROSENSORS;

EID: 33750114303     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. F. Kaluza, et al, "New and future applications of fluxgate sensors," Sensors & Actuators A 106, pp: 48-51, 2003.
2. P. Ripka, "Advances in fluxgate sensors," Sensors & Actuators A 106, pp: 8-14, 2003.
3. Pavel Ripka, "Magnetic Sensors and Magnetometers", Artech House Publishers, January, 2001.
4. P. M. Drljaca, et al, "Single core fully integrated CMOS micro-fluxgate magnetometer," Sensors and Actuators A 110, pp. 236-241, 2004.
5. H. S. Park, et al, "Development of micro-fluxgate sensors with electroplated magnetic cores for electronic compass," Sensors and Actuators A 114, pp. 224-229, 2004.
6. O. Zorlu, et al, "A novel planar magnetic sensor based on orthogonal fluxgate principle," IEEE PRIME'05 Conf. Lausanne, July 2005, Switzerland.
7. J.M. Quemper, et. al, "Permalloy electroplating through photoresist molds," Sensors & Actuators A 74, pp. 1-4, 1999.