Silicone oil contamination and electrical contact resistance degradation of low-force gold contacts

Journal of Microelectromechanical Systems

Volumn 16, Issue 1, 2007, Pages 24-28

  Dickrell III, Daniel J ^a   Dugger, Michael T ^b  

^a UNIVERSITY OF FLORIDA   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Contact resistance; Microelectromechanical systems (MEMS); Silicones; Surface contamination

Indexed keywords

CONTACT RESISTANCE; CONTAMINATION; ELECTRIC ARCS; ELECTRIC CONTACTS; NANOMECHANICS;

CLOSURE RATE; SILICONE OIL; SURFACE CONTAMINATION;

MEMS;

EID: 33947273568     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.885984     Document Type: Article

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