Photo-stimulated desorption from porous low-k films by UV cure treatments with various wavelength

Advanced Metallization Conference (AMC)

Volumn 2006, Issue , 2006, Pages 295-300

  Ito, Fuminori ^a   Takeuchi, Tsuneo ^a   Hayashi, Yoshihiro ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURING; ELASTIC MODULI; HYDROCARBONS; MECHANICAL PROPERTIES; POROUS SILICON; ULTRAVIOLET RADIATION;

HYDROCARBON CONTENTS; LOW-K FILMS; PHOTO STIMULATED DESORPTION; POROUS FILMS;

ELECTRODEPOSITION;

EID: 33947209554     PISSN: 15401766     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. K. Hijioka et al., Jpn. J. Appl. Phys. 43, 1807 (2004).
2. F. Ito et al., Proc. of ADMETA 2005, p10.
3. Y. Hayashi et al., Proc. of ITTC 2004, p225.