Fabrication of nano-pillar chips by a plasma etching technique for fast DNA separation

Thin Solid Films

Volumn 515, Issue 12, 2007, Pages 5167-5171

  Ogawa, R ^a   Ogawa, H ^a   Oki, A ^a   Hashioka, S ^a   Horiike, Y ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

DNA electrophoresis; DNA size separation; Nano pillars; Quartz bonding

Indexed keywords

DNA; ELECTROPHORESIS; MASKS; PLASMA ETCHING; QUASICRYSTALS; SIZE SEPARATION;

ENLARGED MASK DIAMETER; NANOPILLARS; QUARTZ BONDING; RESPUTTERING;

BIOCHIPS;

EID: 33947106414     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.10.072     Document Type: Article

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