More than Moore: Micro-machined products enable new applications and open new markets

Technical Digest - International Electron Devices Meeting, IEDM

Volumn 2005, Issue , 2005, Pages 1-8

  Vigna, Benedetto ^a  

^a STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CONFORMAL MAPPING; ENERGY CONVERSION; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; ROBOTS; SEMICONDUCTOR MATERIALS; WIRELESS SENSOR NETWORKS;

DOMESTIC ROBOTS; LABS ON CHIPS; MICROELECTRONIC INDUSTRY; MOORE'S LAW;

MICROMACHINING;

EID: 33847723021     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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