Excimer UV-assisted rapid thermal annealing of PbLa (Zr,Ti) O3 thin films by a sol-gel deposition method

Journal of Applied Physics

Volumn 101, Issue 2, 2007, Pages

  Shannigrahi, S R ^a   Lim, X ^b   Tay, F E H ^b  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

RAPID THERMAL ANNEALING; SEMICONDUCTING LEAD COMPOUNDS; SILICON; SOL-GEL PROCESS; SUBSTRATES; ULTRAVIOLET DEVICES;

PROCESSING TEMPERATURE; REMNANT POLARIZATION; SILICON SUBSTRATES;

FERROELECTRIC THIN FILMS;

EID: 33847696131     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2424534     Document Type: Article

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