Advanced fringe analysis techniques in circuit edit

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn 2006, Issue , 2006, Pages 79-85

  Jain, R K ^a   Malik, T ^a   Lundquist, T R ^a   Tsao, C C ^a   Walecki, W J ^b  

^a Credence Systems Corporation   (United States)

^b Frontier Semiconductor   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33847634724     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. Hernandez, G. Fabry-Pérot Interferometers, (1986), Cambridge: Cambridge University Press
2. C-C Tsao, P. Sudraud, P. Bouchet, and M. Thompson, LSITS, 2001
3. C. Boit, K. Wirth, and E. Le Roy, ISTFA 2003, pp 331-337
4. M.A. Thompson et al., ISTFA 2002, pp 409-417
5. R.K. Jain et al., ISTFA 2005, pp 70-77
6. V.V. Makarov, W.T. Thompson, T.R. Lundquist, M. Thompson and T.T. Miau, 3rd AVS International Conference on Microelectronics and Interfaces February 2002, pp 115-117
7. R. M. A Azzam, N. M. Bashray, "Ellipsometry and Polarized Light, North-Holland, Amsterdam, ISBN 0-444-87016-4 (1987)
8. Tabulated values were found on http://ee.bvu.edu/photonics/ optical_constants.phtml last viewed on 6/21/2006 and are based on Edward D. Palik "Handbook of optical constants of solids"
9. G. R. Fowles "Introduction to modern optics", Dover (New York 1989)
10. J.E. Greivenkamp, and J. H.Bruning, "Phase Shifting Interferometers," in Optical Shop Testing, D. Malacara, Ed., Wiley, New York, 1992, pp, 501-598.
11. J. C. Wyant and K. Creath "Recent advances in interferometric optical testing", Laser Focus/Electro - Optics vol. 21, pp 118-132 (1985).
12. D. J. Bone Applied Optics vol 30, pp. 3621- 3632, (1991).