Study of photo-resistance and polyimide strip by atmospheric plasma technology

Surface and Coatings Technology

Volumn 201, Issue 15, 2007, Pages 6530-6535

  Liu, Wen Jen ^a   Lan, Yung Chiang ^b   Chen, Yong Chih ^a   Lo, Wan Chung ^c   Lin, Chao Hsien ^c  

^a I SHOU UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c METAL INDUSTRIES RESEARCH AND DEVELOPMENT CENTRE   (Taiwan)

Author keywords

Atmospheric pressure plasma; Dielectric barrier discharge; Plasma jet; Surface treatment

Indexed keywords

AC GENERATORS; PHOTORESISTS; PLASMA JETS; POLYIMIDES; STRIPPING (REMOVAL);

ATMOSPHERIC PRESSURE PLASMA; DIELECTRIC BARRIER DISCHARGE; PLASMA IGNITION; POLYMER REMOVAL;

PLASMA APPLICATIONS;

AC GENERATORS; PHOTORESISTS; PLASMA APPLICATIONS; PLASMA JETS; POLYIMIDES; STRIPPING (REMOVAL);

EID: 33847398739     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.09.061     Document Type: Article

References (8)

1. Yi C.H., Lee Y.H., Kim D.W., and Yeom G.Y. Surf. Coat. Technol. 163-164 (2003) 723
2. Xu X. Thin Solid Films 390 (2001) 237
3. Andreas S., James Y.J., Steven E.B., Jaeyoung P., Gary S.S., and Robert F.H. IEEE Trans. Plasma Sci. 26 (1998) 1685
4. Michael N., Jost D., Silke S., and Uwe L. Int. J. Adhes. Adhes. 24 (2004) 171
5. Kim M.C., Song D.K., Shin H.S., Baeg S.H., Kim G.S., Boo J.H., Han J.G., and Yang S.H. Surf. Coat. Technol. 171 (2003) 312
6. Tanaka K., Inomata T., and Kogoma M. Thin Solid Films 386 (2001) 217
7. Goossens O., Dekempeneer E., Vangeneugden D., Van de Leest R., and Leys C. Surf. Coat. Technol. 142-144 (2001) 474
8. Lee Y.H., Yi C.H., Chung M.J., and Yeom G.Y. Surf. Coat. Technol. 146-147 (2001) 474