Preparation of diamond-like carbon by PBII-enhanced microwave ECR chemical vapor deposition

Surface and Coatings Technology

Volumn 201, Issue 15, 2007, Pages 6623-6626

  Ma, Guojia ^a   Zhang, Huafang ^a   Wu, Hongchen ^a   Peng, Liping ^a   Jiang, Yanli ^a  

^a AVIC Manufacturing Technology Institute   (China)

Author keywords

Diamond like carbon; Microwave ECR; PBII

Indexed keywords

BOND STRENGTH (MATERIALS); CHEMICAL VAPOR DEPOSITION; HARDNESS; ION IMPLANTATION; PLASMA APPLICATIONS; SILICON WAFERS; SYNTHESIS (CHEMICAL);

MICROINDENTATION TECHNIQUE; PLASMA-BASED ION IMPLANTATION;

DIAMOND LIKE CARBON FILMS;

BOND STRENGTH (MATERIALS); CHEMICAL VAPOR DEPOSITION; DIAMOND LIKE CARBON FILMS; HARDNESS; ION IMPLANTATION; PLASMA APPLICATIONS; SILICON WAFERS; SYNTHESIS (CHEMICAL);

EID: 33847374683     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.09.012     Document Type: Article

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