Three-dimensional direct-write lithography into photopolymer

Applied Optics

Volumn 46, Issue 3, 2007, Pages 295-301

  Sullivan, Amy C ^a   Grabowski, Matthew W ^a   McLeod, Robert R ^b  

^a UNIVERSITY OF COLORADO   (United States)

^b University of Colorado   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTINUOUS WAVE LASERS; DIFFUSION; EMBEDDED SYSTEMS; GLASS; PHOTOLITHOGRAPHY; SIZE DETERMINATION; WAVEGUIDES;

FEMTOSECOND WRITING; PHOTOPOLYMER; WRITING BEAM;

POLYMERS;

EID: 33847318626     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.000295     Document Type: Article

References (26)

1. K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, "Writing waveguides in glass with a femtosecond laser," Opt. Lett. 21, 1729-1731 (1996).
2. A. Saliminia, N. T. Nguyen, M.-C. Nadeau, S. Petit, S. L. Chin, and R. Vallée, "Writing optical waveguides in fused silica using 1 kHz femtosecond infrared pulses," J. Appl. Phys. 93, 3724-3728 (2003).
3. M. Will, S. Nolte, B. N. Chichkov, and A. Tünnermann, "Optical properties of waveguides fabricated in fused silica by femtosecond laser pulses," Appl. Opt. 41, 4360-4364 (2002).
4. M. Ams, G. D. Marshall, D. J. Spence, and M. J. Withford, "Slit beam shaping method for femtosecond laser direct-write fabrication of symmetric waveguides in bulk glasses," Opt. Express 13, 5676-5681 (2005).
5. S. Nolte, M. Will, J. Burghoff, and A. Tuennermann, "Femto-second waveguide writing: a new avenue to three-dimensional integrated optics," Appl. Phys. A 77, 109-111 (2003).
6. A. M. Kowalevicz, V. Sharma, E. P. Ippen, J. G. Fujimoto, and K. Minoshima, "Three-dimensional photonic devices fabricated in glass by use of a femtosecond laser oscillator," Opt. Lett. 30, 1060-1062 (2005).
7. B. L. Booth, "Low loss channel waveguides in polymers," J. Lightwave Technol. 7, 1445-1453 (1989).
8. L. Dhar, A. Hale, H. E. Katz, L. Schilling, M. G. Schnoes, and F. C. Schilling, "Recording media that exhibit high dynamic range for digital holographic data storage," Opt. Lett. 24, 487-489 (1999).
9. R. A. Waldman, R. T. Ingwall, P. K. Dhal, M. G. Horner, E. S. Kolb, H-Y. S. Li, R. A. Minns, and H. G. Schild, "Cationic ring-opening photopolymerization methods for holography," in Diffractive and Holographic Optics Technology III, I. Cindrich and S. H. Lee, eds., Proc. SPIE 2689, 127-141 (1996).
10. M. Schnoes, B. Ihas, A. Hill, L. Dhar, D. Michaels, S. Setthachayanon, G. Schomberger, and W. L. Wilson, "Holographic data storage media for practical systems," in Practical Holography XVII and Holographic Materials IX, T. H. Jeong and S. H. Stevenson, eds., Proc. SPIE 5005, 29-37 (2003).
11. R. R. Krchnavek, G. R. Lalk, and D. H. Hartman, "Laser direct writing of channel waveguides using spin-on polymers," J. Appl. Phys. 66, 5156-5160 (1989).
12. L. Eldada, C. Xu, K. M. T. Stengel, L. W. Shacklette, and J. T. Yardley, "Laser-fabricated low-loss single-mode raised-rib waveguiding devices in polymers," J. Lightwave Technol. 14, 1704-1713 (1996).
13. A. K. Das, B. S. Chaudhari, and S. Ghosh, "Characteristics of polymeric optical passive single-mode waveguiding devices fabricated by an argon-ion laser," Appl. Opt. 37, 6779-6786 (1998).
14. S. Garner, S. Lee, V. Chuyanov, A. Chen, A. Yacoubian, W. H. Steier, and L. R. Dalton, "Three-dimensional integrated optics using polymers," IEEE J. Quantum Electron. 35, 1146-1155 (1999).
15. B. H. Cumpston, S. P. Ananthavel, S. Barlow, D. L. Dyer, J. E. Ehrich, L. L. Erskine, A. A. Heikal, S. M. Kuebler, I. Y. S. Lee, D. McCord-Maughon, J. Qin, H. Röckel, M. Rumi, X. Wu, S. R. Marder, and J. W. Perry, "Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication," Nature 398, 51-54 (1999).
16. S. Maruo, O. Nakamura, and S. Kawata, "Three-dimensional microfabrication with two-photon-absorbed photopolymerization," Opt. Lett. 22, 132-134 (1997).
17. K. Dorkenoo, O. Crégut, L. Mager, and F. Gillot, "Quasisolitonic behavior of self-written waveguides created by photopolymerization," Opt. Lett. 27, 1782-1784 (2002).
18. M. Yonemura, A. Kawasaki, S. Kato, and M. Kagami, "Polymer waveguide module for visible wavelength division multiplexing plastic optical fiber communication," Opt. Lett. 30, 2206-2208 (2005).
19. R. R. McLeod, A. J. Daiber, M. E. McDonald, T. L. Robertson, T. Slagle, S. L. Sochava, and L. Hesselink, "Microholographic multilayer optical disk data storage," Appl. Opt. 44, 3197-3207 (2005).
20. R. R. McLeod, A. C. Sullivan, M. W. Grabowski, T. Scott, "Hybrid integrated optics in volume holographic photopolymer," in Organic Holographic Materials and Applications II, K. Meerholz, ed., Proc. SPIE 5521, 55-62 (2004).
21. K. A. Berchtold, T. M. Lovestead, and C. N. Bowman, "Coupling chain length dependent and reaction diffusion controlled termination in the free radical polymerization of multi-functional (meth)acrylates," Macromolecules 35, 7968-7975 (2002).
22. J. C. Urbach and R. W. Meier, "Properties and limitations of hologram recording materials," Appl. Opt. 8, 2269-2281 (1969).
23. InPhase Technologies, Tapestry Media, www.inphase-technologies.com.
24. Aprilis, Inc., HMC media, www.aprilisinc.com/datastorage_media.htm.
25. J. B. Pawley, Handbook of Biological Confocal Microscopy, 2nd ed. (Plenum Press, 1995).
26. M. Pluta, Advanced Light Microscopy, Vol. 2, Specialized Methods (Elsevier, 1989).