IC compatible MEMS technology

GAAS 2005 Conference Proceedings - 13th European Gallium Arsenide and Other Compound Semiconductors Application Symposium

Volumn 2005, Issue , 2005, Pages 293-296

  Grenier, K ^a   Mazenq, L ^a   Dubuc, D ^a   Bouchriha, F ^a   Coccetti, F ^a   Ojefors, E ^b   Lindberg, P ^b   Rydberg, A ^b   Berntgen, J ^c   Rabe, W J ^c   Sonmez, E ^d   Abele, P ^d   Schumacher, H ^d   Plana, R ^a  

^a LAAS CNRS   (France)

^b UPPSALA UNIVERSITY   (Sweden)

^c Atmel Germany GmbH   (Germany)

^d UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; MILLIMETER WAVES; SEMICONDUCTING SILICON COMPOUNDS; TELECOMMUNICATION NETWORKS;

COMMUNICATION MODULES; MILLIMETER WAVE APPLICATIONS; SIGE CIRCUITS;

MICROELECTROMECHANICAL DEVICES;

EID: 33847303691     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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