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Volumn 2005, Issue , 2005, Pages 564-567

Capacitive humidity sensors based on oxidized photoBCB polymer films: Enhanced sensitivity and response time

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; HUMIDITY CONTROL; MEDICAL APPLICATIONS; OXIDATION; PLASTIC FILMS; SENSITIVITY ANALYSIS;

EID: 33847301975     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597761     Document Type: Conference Paper
Times cited : (4)

References (9)
  • 1
    • 4043161935 scopus 로고    scopus 로고
    • Dynamic behavior of a chemical sensor for humidity level measurement in human breath
    • August
    • A. Tetelin, V. Pouget, J-L. Lachaud, C. Pellet, "Dynamic behavior of a chemical sensor for humidity level measurement in human breath", IEEE Trans. Instrum. Meas., vol.53, pp. 1262-1267, August 2004.
    • (2004) IEEE Trans. Instrum. Meas , vol.53 , pp. 1262-1267
    • Tetelin, A.1    Pouget, V.2    Lachaud, J.-L.3    Pellet, C.4
  • 2
    • 4043155724 scopus 로고    scopus 로고
    • A rapid-response, high-sensitivity nanophase humidity sensor for respiratory monitoring
    • August
    • A. Kaan Kalkan, H. Li, C.J. O'Brien, and S.J. Fonash, "A rapid-response, high-sensitivity nanophase humidity sensor for respiratory monitoring", IEEE Electron Device Letters, vol. 25, pp. 526-528, August 2004.
    • (2004) IEEE Electron Device Letters , vol.25 , pp. 526-528
    • Kaan Kalkan, A.1    Li, H.2    O'Brien, C.J.3    Fonash, S.J.4
  • 3
    • 0031041728 scopus 로고    scopus 로고
    • An apnea monitor using a rapid-response hygrometer
    • January
    • T. Tatara and K. Tsuzaki, "An apnea monitor using a rapid-response hygrometer", J. Clin. Monit, vol. 13, pp. 5-9, January 1997.
    • (1997) J. Clin. Monit , vol.13 , pp. 5-9
    • Tatara, T.1    Tsuzaki, K.2
  • 4
    • 24944442019 scopus 로고    scopus 로고
    • Transepidermal water loss sensor based on fast dew point hygrometer
    • September
    • R. Jachowicz, J. Weremczuk, G. Tarapata, "Transepidermal water loss sensor based on fast dew point hygrometer", Sens. Actuators A: Phys., vol. 123-124, pp. 7-11, September 2005.
    • (2005) Sens. Actuators A: Phys , vol.123-124 , pp. 7-11
    • Jachowicz, R.1    Weremczuk, J.2    Tarapata, G.3
  • 6
    • 0011446984 scopus 로고
    • Moisture uptake of BisBenzocyclobutene (BCB) films for electronic packaging applications
    • H. Pranjoto and D.D. Denton, "Moisture uptake of BisBenzocyclobutene (BCB) films for electronic packaging applications", Mat. Res. Soc. Symp. Proc., vol. 203, pp. 295-302, 1991.
    • (1991) Mat. Res. Soc. Symp. Proc , vol.203 , pp. 295-302
    • Pranjoto, H.1    Denton, D.D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.