|
Volumn 2005, Issue , 2005, Pages 564-567
|
Capacitive humidity sensors based on oxidized photoBCB polymer films: Enhanced sensitivity and response time
|
Author keywords
[No Author keywords available]
|
Indexed keywords
CAPACITANCE;
HUMIDITY CONTROL;
MEDICAL APPLICATIONS;
OXIDATION;
PLASTIC FILMS;
SENSITIVITY ANALYSIS;
FILM SURFACES;
HUMIDITY SENSORS;
PREDICTIVE SIMULATIONS;
SENSORS;
|
EID: 33847301975
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ICSENS.2005.1597761 Document Type: Conference Paper |
Times cited : (4)
|
References (9)
|